The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2024
Filed:
Mar. 09, 2021
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Mirko Vukovic, Albany, NY (US);
Daniel Fulford, Albany, NY (US);
Anton J. Devilliers, Albany, NY (US);
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
B05B 12/08 (2006.01); G01B 11/06 (2006.01); H01L 21/67 (2006.01); G01N 21/55 (2014.01); G01N 21/84 (2006.01);
U.S. Cl.
CPC ...
B05B 12/084 (2013.01); G01B 11/0625 (2013.01); H01L 21/6715 (2013.01); H01L 21/67253 (2013.01); G01N 2021/556 (2013.01); G01N 2021/8427 (2013.01);
Abstract
Light can be used to monitor coating a liquid on a substrate. By directing the light to a spot on the substrate, when the liquid passes through the spot, some light will be reflected, while some light will be scattered. Monitoring this behavior can indicate whether a substrate has been successfully coated with the liquid, as well as identifying defects. Further, coating times can be monitored to make process adjustments.