Daniel J Fulford

Title: The Innovations of Daniel J Fulford

Introduction

Daniel J Fulford is a prominent inventor based in Albany, NY, known for his significant contributions to the field of semiconductor technology. With a remarkable portfolio of 25 patents, Fulford has made strides in improving measurement tools and bonding devices used in the semiconductor industry. His work has been instrumental in enhancing the accuracy and efficiency of semiconductor manufacturing processes.

Latest Patents

Fulford's latest patents include a "Contactless capacitive measurement tool with improved throughput and accuracy." This invention provides systems and methods for determining the planarity of a semiconductor wafer. The capacitive measurement tool utilizes a non-contact, capacitive sensor unit to measure wafer bow, employing multiple electrodes to obtain capacitance measurements from various locations on the wafer surface. This innovative approach increases data collection across the wafer, thereby improving throughput and measurement accuracy.

Another notable patent is the "3D multiple location compressing bonded arm for advanced integration." This invention features a bonding device designed for bonding two wafers. It includes a first bonding chuck with a bonding head for one wafer and a second bonding chuck with multiple bonding heads for the second wafer. The individual control of the second bonding heads allows for the application of local pressures, facilitating the bonding process based on the bow measurements of both wafers.

Career Highlights

Fulford's career is marked by his role at Tokyo Electron Limited, where he has contributed to various innovative projects. His expertise in semiconductor technology has positioned him as a key player in the industry, driving advancements that enhance manufacturing processes.

Collaborations

Throughout his career, Fulford has collaborated with notable colleagues, including Anton J deVillers and Jodi Grzeskowiak. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.

Conclusion

Daniel J Fulford's contributions to semiconductor technology through his patents and career at Tokyo Electron Limited highlight his role as a leading inventor in the field. His innovative solutions continue to shape the future of semiconductor manufacturing, demonstrating the impact of his work on the industry.