Company Filing History:
Years Active: 2022-2025
Title: The Innovations of Michael Philip Roberts
Introduction
Michael Philip Roberts is a notable inventor based in Tigard, Oregon. He has made significant contributions to the field of semiconductor processing, holding a total of nine patents. His work focuses on enhancing the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
One of his latest patents is titled "Apparatuses for uniform fluid delivery in a multi-station semiconductor processing chamber." This patent describes a system that includes a semiconductor processing chamber with multiple processing stations, manifold trunks, valves, and fluid manifolds. Each manifold trunk is designed with an outlet, a common flowpath, trunk inlets, orifices, and valve interfaces to ensure uniform fluid delivery.
Another significant patent by Roberts is "Rapid tuning of critical dimension non-uniformity by modulating temperature transients of multi-zone substrate supports." This invention involves a substrate processing system that features a processing chamber and a substrate support with several heater zones. The system is equipped with a gas delivery system and a controller that manages the heating process during critical treatment steps, optimizing the performance of the substrate support.
Career Highlights
Michael Philip Roberts is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has allowed him to develop innovative solutions that address complex challenges in semiconductor manufacturing.
Collaborations
Roberts has collaborated with several talented individuals in his field, including Ramesh Chandrasekharan and Adrien Lavoie. These collaborations have contributed to the advancement of technology in semiconductor processing.
Conclusion
Michael Philip Roberts is a distinguished inventor whose work has significantly impacted the semiconductor industry. His innovative patents and contributions to Lam Research Corporation highlight his expertise and commitment to advancing technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.