The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2024
Filed:
Feb. 12, 2020
Lam Research Corporation, Fremont, CA (US);
Ramesh Chandrasekharan, Lake Oswego, OR (US);
Michael Philip Roberts, Tigard, OR (US);
Pulkit Agarwal, Beaverton, OR (US);
Adrien Lavoie, Newberg, OR (US);
Ravi Kumar, Beaverton, OR (US);
Nuoya Yang, Portland, OR (US);
Chan Myae Myae Soe, Santa Clara, CA (US);
Ashish Saurabh, Portland, OR (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A substrate processing system is provided and includes a substrate support, a memory, and calibration, operating parameter, and solving modules. The substrate support supports a substrate and includes temperature control elements. The memory stores, for the temperature control elements, temperature calibration values and sensitivity calibration values. The calibration module, during calibration of the temperature control elements, performs a first calibration process to determine the temperature calibration values or a second calibration process to determine the sensitivity calibration values. The sensitivity calibration values relate at least one of trim amounts or deposition amounts to temperature changes. The operating parameter module determines operating parameters for the temperature control elements based on the temperature and sensitivity calibration values. The solving module, subsequent to the calibration of the temperature control elements, controls operation of the temperature control elements during at least one of a trim or deposition step based on the operating parameters.