The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2022
Filed:
Nov. 15, 2018
Lam Research Corporation, Fremont, CA (US);
Michael Philip Roberts, Tigard, OR (US);
Ramesh Chandrasekharan, Portland, OR (US);
Pulkit Agarwal, Beaverton, OR (US);
Aaron Bingham, Newberg, OR (US);
Ashish Saurabh, Haryana, IN;
Ravi Kumar, Providence, RI (US);
Jennifer Leigh Petraglia, Portland, OR (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A substrate processing system configured to perform a deposition process on a substrate includes a substrate support including a plurality of zones and a plurality of resistive heaters arranged throughout the plurality of zones. The plurality of resistive heaters includes separately-controllable resistive heaters arranged in respective ones of the plurality of zones. A controller is configured to, during the deposition process, control the plurality of resistive heaters to selectively adjust temperatures within the plurality of zones.