The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2025
Filed:
Jun. 22, 2020
Lam Research Corporation, Fremont, CA (US);
Ramesh Chandrasekharan, Lake Oswego, OR (US);
Michael Philip Roberts, Tigard, OR (US);
Aaron Bingham, Sherwood, OR (US);
Ashish Saurabh, Portland, OR (US);
Adrien Lavoie, Newberg, OR (US);
Pulkit Agarwal, Beaverton, OR (US);
Ravi Kumar, Beaverton, OR (US);
LAM RESEARCH CORPORATION, Fremont, CA (US);
Abstract
A system to process a semiconductor substrate includes a substrate support assembly configured to support the semiconductor substrate. The substrate support assembly includes M resistive heaters respectively arranged in M zones in a layer of the substrate support assembly, where M is an integer greater than 1. The layer is adjacent to the semiconductor substrate. The substrate support assembly includes N temperature sensors arranged at N locations in the layer, where N is an integer greater than 1 and less than or equal to M. The system further includes a controller configured to control one or more of the M resistive heaters based on a temperature sensed by one of the N temperature sensors and average temperatures of one or more of the M zones.