The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2025
Filed:
Apr. 28, 2022
Lam Research Corporation, Fremont, CA (US);
Eli Jeon, Sherwood, OR (US);
Michael Philip Roberts, Tigard, OR (US);
Douglas Walter Agnew, Portland, OR (US);
Daniel Boatright, Estacada, OR (US);
Arun Anandhan Duraisamy, Wilsonville, OR (US);
Joseph R. Abel, West Linn, OR (US);
William Laurence Mcdaniel, West Linn, OR (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
The present disclosure relates to a system for a semiconductor processing. The system includes a semiconductor processing chamber having a plurality of processing stations, a plurality of manifold trunks, a plurality of valves, and a plurality of fluid manifolds. Each manifold trunk includes an outlet, a common flowpath, a plurality of trunk inlets, a plurality of orifices, and a plurality of valve interfaces.