Michael Friedmann

Title: Innovations of Michael Friedmann: Advancements in Semiconductor Metrology

Introduction

Michael Friedmann, based in Mountain View, CA, is a notable innovator in the field of semiconductor technology. With an impressive portfolio of 34 patents, he has contributed significantly to advancements in soft x-ray scatterometry and the recycling of rare gases in semiconductor processing.

Latest Patents

Friedmann’s latest patents showcase his innovative approaches and deep understanding of semiconductor structures. One such patent is titled "Methods and systems for compact, small spot size soft x-ray scatterometry." This patent presents methods and systems for performing measurements of semiconductor structures utilizing high-brightness Soft X-Ray (SXR) illumination over a small illumination spot size, facilitating a compact physical footprint. The focusing optics in his metrology system project an image of the illumination source onto the specimen under measurement with a demagnification of at least 1.25. The design includes an illumination beam path measuring less than 2 meters, making it both efficient and precise. The measurements are conducted in the soft x-ray region (80-3000 eV) and at grazing angles of incidence, exemplifying the advanced techniques developed by Friedmann.

Another notable patent is "Collecting and recycling rare gases in semiconductor processing equipment." This patent describes a process chamber connected with a recovery unit that enables the recycling of rare gases within semiconductor processing equipment. The system operates as a closed unit, facilitating efficient gas transport at variable flow rates while maintaining constant flow conditions during separation.

Career Highlights

Friedmann has had a distinguished career, having worked with esteemed companies such as KLA-Tencor Corporation and KLA-Tencor Technologies Corporation. His roles in these organizations have allowed him to harness his expertise in semiconductor technologies and drive innovative solutions that address critical challenges in the industry.

Collaborations

Throughout his career, Friedmann has collaborated with accomplished professionals such as Walter Dean Mieher and Ady Levy. These collaborations have fostered an environment of creativity and innovation, leading to significant advancements in the semiconductor field.

Conclusion

Michael Friedmann epitomizes the spirit of innovation within the semiconductor technology landscape. With a remarkable array of patents and a strong professional background, he continues to pave the way for future advancements in the industry. His work not only addresses current challenges but also sets the stage for further exploration and development in semiconductor metrology and processing.