Kawasaki, Japan

Masaru Takeshita


Average Co-Inventor Count = 2.6

ph-index = 5

Forward Citations = 128(Granted Patents)


Location History:

  • Kanagawa-ken, JP (2009 - 2012)
  • Kanagawa, JP (2009 - 2013)
  • Kawasaki, JP (2007 - 2016)

Company Filing History:


Years Active: 2007-2024

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38 patents (USPTO):

Title: Innovations by Masaru Takeshita: A Pioneer in Resist Technology

Introduction

Masaru Takeshita, a distinguished inventor based in Kawasaki, Japan, has made significant contributions to the field of resist technology, amassing a total of 38 patents throughout his career. His work primarily focuses on developing resist compositions and methods for forming resist patterns critical to modern semiconductor manufacturing.

Latest Patents

Among his latest patents is a groundbreaking resist composition and method of forming a resist pattern. The resist composition comprises a silicon-containing resin, an acid generator, and a photodecomposable base to control the diffusion of the generated acid. The silicon content in the resin is maintained between 20% to 25% relative to the total atomic composition. The method of forming a resist pattern involves creating a resist film which exhibits increased solubility in an alkali developing solution. This process includes exposing and baking the resist film to neutralize the base generated from the photo-base generator while enhancing the solubility of unexposed portions, ultimately resulting in a negative-tone resist pattern.

Career Highlights

Masaru Takeshita’s professional journey includes notable tenures at leading companies such as Tokyo Ohka Kogyo Co., Ltd., and Mitsubishi Rayon Company, Limited. His expertise in resist technology has not only garnered patents but has also influenced advancements in semiconductor manufacturing practices.

Collaborations

In his innovative endeavors, Masaru has worked alongside talented individuals, including Takeshi Iwai and Hideo Hada. Their collaborative efforts have further propelled the development of resist technologies and have had a lasting impact on the industry.

Conclusion

Masaru Takeshita’s contributions to resist technology exemplify the spirit of innovation in the semiconductor field. With 38 patents to his name, his work continues to influence advancements, setting a high standard for future inventors in this vital industry. His innovative spirit serves as an inspiration to both current and aspiring inventors.

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