The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2013
Filed:
Dec. 07, 2011
Yoshiyuki Utsumi, Kawasaki, JP;
Masaru Takeshita, Kawasaki, JP;
Hiroaki Shimizu, Kawasaki, JP;
Syo Abe, Kawasaki, JP;
Yoshitaka Komuro, Kawasaki, JP;
Yoshiyuki Utsumi, Kawasaki, JP;
Masaru Takeshita, Kawasaki, JP;
Hiroaki Shimizu, Kawasaki, JP;
Syo Abe, Kawasaki, JP;
Yoshitaka Komuro, Kawasaki, JP;
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Abstract
A resist composition including a base component (A) which exhibits changed solubility in a developing solution under action of acid, a nitrogen-containing organic compound (C) containing a compound (C1) represented by general formula (c1) shown below and an acid-generator component (B) which generates acid upon exposure (excluding the compound (C1)) (Rrepresents an alicyclic group of 5 or more carbon atoms which may have a substituent; X represents a divalent linking group; Y represents a linear, branched or cyclic alkylene group or an arylene group; Rf represents a hydrocarbon group containing a fluorine atom; and Mrepresents an organic cation).