Masahiro Tabata

This inventor holds 41 USPTO granted patents and 1 published patent application, primarily in Plasma Processing. Top assignee: Tokyo Electron Limited. Active years: 2019-2026.

USPTO Granted Patents = 41 (Patent Applications = 1)

% Patents Active = 100.0

Average Co-Inventor Count = 2.0

ph-index = 2

Forward Citations = 13(Granted Patents)

Company Filing History:

41 out of 10,837

Tokyo Electron Limited

patents

Years Active: 2019-2026

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Areas of Expertise:

Substrate Processing

Plasma Processing

Etching Method

Silicon Nitride

Silicon Oxide

Film Forming

Workpiece Processing

Target Object

Semiconductor Manufacturing

Film Etching

Apparatus

Method

41 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12532683 - Apparatus for substrate processing (2026-01-20),

2. 12476115 - Method for processing workpiece (2025-11-18),

3. 12325919 - Apparatus for processing substrate (2025-06-10),

4. 12308241 - Plasma processing method and plasma processing apparatus (2025-05-20),

5. 12051595 - Plasma processing method and plasma processing apparatus (2024-07-30),

6. 11735423 - Workpiece processing method (2023-08-22),

7. 11658036 - Apparatus for processing substrate (2023-05-23),

8. 11637025 - Apparatus for selectively etching first region made of silicon nitride against second region made of silicon oxide (2023-04-25),

9. 11594422 - Film etching method for etching film (2023-02-28),

10. 11574814 - Substrate and substrate processing method (2023-02-07),

11. 11574806 - Film forming method (2023-02-07),

12. 11488836 - Apparatus for substrate processing (2022-11-01),

13. 11380551 - Method of processing target object (2022-07-05),

14. 11322354 - Workpiece processing method (2022-05-03),

15. 11289339 - Plasma processing method and plasma processing apparatus (2022-03-29),

Title: The Innovative Journey of Masahiro Tabata

Introduction: Masahiro Tabata, a pioneering inventor hailing from Miyagi, Japan, has made significant contributions to the world of technology through his groundbreaking innovations.

Latest Patents: Masahiro Tabata holds several patents in the field of robotics and artificial intelligence, with his most recent patent focusing on a revolutionary autonomous drone technology designed for search and rescue operations.

Career Highlights: With a career spanning over two decades, Masahiro Tabata has worked with leading tech companies in Japan, spearheading research and development projects that have pushed the boundaries of what is possible in the realm of robotics.

Collaborations: Throughout his career, Masahiro Tabata has collaborated with top research institutions and universities in Japan, fostering a culture of innovation and knowledge-sharing that has led to the development of cutting-edge technologies.

Conclusion: Masahiro Tabata's relentless pursuit of innovation and his passion for creating technologies that make a positive impact on society have solidified his position as a visionary inventor in the field of robotics.