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Masahiro Tabata

USPTO Granted Patents = 40 (Patent Applications = 1)

Average Co-Inventor Count = 2.0

ph-index = 2

Forward Citations = 13(Granted Patents)

Company Filing History:

40 out of 10,326

Tokyo Electron Limited

Years Active: 2019-2025

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Areas of Expertise:

Plasma Processing

Workpiece Processing

Substrate Processing

Film Etching

Silicon Nitride

Silicon Oxide

Semiconductor Manufacturing

Target Object Processing

Film Forming

Etching Techniques

Apparatus Design

Processing Methods

40 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12476115 - Method for processing workpiece (2025-11-18),

2. 12325919 - Apparatus for processing substrate (2025-06-10),

3. 12308241 - Plasma processing method and plasma processing apparatus (2025-05-20),

4. 12051595 - Plasma processing method and plasma processing apparatus (2024-07-30),

5. 11735423 - Workpiece processing method (2023-08-22),

6. 11658036 - Apparatus for processing substrate (2023-05-23),

7. 11637025 - Apparatus for selectively etching first region made of silicon nitride against second region made of silicon oxide (2023-04-25),

8. 11594422 - Film etching method for etching film (2023-02-28),

9. 11574814 - Substrate and substrate processing method (2023-02-07),

10. 11574806 - Film forming method (2023-02-07),

11. 11488836 - Apparatus for substrate processing (2022-11-01),

12. 11380551 - Method of processing target object (2022-07-05),

13. 11322354 - Workpiece processing method (2022-05-03),

14. 11289339 - Plasma processing method and plasma processing apparatus (2022-03-29),

15. 11239090 - Plasma processing method and plasma processing apparatus (2022-02-01),

Title: The Innovative Journey of Masahiro Tabata

Introduction: Masahiro Tabata, a pioneering inventor hailing from Miyagi, Japan, has made significant contributions to the world of technology through his groundbreaking innovations.

Latest Patents: Masahiro Tabata holds several patents in the field of robotics and artificial intelligence, with his most recent patent focusing on a revolutionary autonomous drone technology designed for search and rescue operations.

Career Highlights: With a career spanning over two decades, Masahiro Tabata has worked with leading tech companies in Japan, spearheading research and development projects that have pushed the boundaries of what is possible in the realm of robotics.

Collaborations: Throughout his career, Masahiro Tabata has collaborated with top research institutions and universities in Japan, fostering a culture of innovation and knowledge-sharing that has led to the development of cutting-edge technologies.

Conclusion: Masahiro Tabata's relentless pursuit of innovation and his passion for creating technologies that make a positive impact on society have solidified his position as a visionary inventor in the field of robotics.

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