Koshi, Japan

Masahiro Fukuda

USPTO Granted Patents = 20 

Average Co-Inventor Count = 3.6

ph-index = 2

Forward Citations = 24(Granted Patents)


Location History:

  • Koshi, JP (2010 - 2023)
  • Kumamoto, JP (2013 - 2024)

Company Filing History:


Years Active: 2010-2024

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20 patents (USPTO):Explore Patents

Title: The Innovative Contributions of Masahiro Fukuda

Introduction

Masahiro Fukuda is a prominent inventor based in Koshi, Japan, known for his significant contributions to the field of substrate processing technology. With a remarkable portfolio of 20 patents, Fukuda has greatly advanced the methods and apparatus used in the development processing of substrates.

Latest Patents

Fukuda's latest inventions include a development processing apparatus that revolutionizes the way substrates with resist films are treated. This apparatus features a substrate holder that maintains a horizontal position for the substrate, alongside a rotator that enables smooth turning during the development process. The innovation involves first and second developer supplies tailored to optimize developer application, including specific enhancements to a liquid receiver that enables independent movement for efficient processing.

Another groundbreaking patent describes a substrate processing method utilizing a nozzle that precisely controls developer flow rates while ensuring effective contact with the substrate surface. By innovatively managing the nozzle's movements in relation to the substrate, Fukuda improves the overall efficiency and effectiveness of the developing process.

Career Highlights

Masahiro Fukuda is currently affiliated with Tokyo Electron Limited, a leading firm in the electronics and semiconductor industries. His expertise in developing cutting-edge processing equipment has positioned him as a key innovator in substrate technology, significantly impacting the operational capabilities of various manufacturing systems.

Collaborations

Throughout his career, Fukuda has collaborated with esteemed colleagues, including Taro Yamamoto and Kouichirou Tanaka. Their combined expertise and innovative spirit have fostered a collaborative environment that has led to groundbreaking advancements in substrate processing techniques.

Conclusion

Masahiro Fukuda's contributions to the field of substrate processing are invaluable. With 20 patents attributed to his name, he demonstrates a relentless pursuit of innovation that has refined and enhanced the technologies used in electronic manufacturing. As an influential figure at Tokyo Electron Limited, Fukuda’s work continues to shape the future of substrate development processes.

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