Location History:
- Tokyo, JP (2007 - 2012)
- Hachioji, JP (2012 - 2017)
- Nirasaki, JP (2011 - 2020)
- Yamanashi, JP (2018 - 2020)
Company Filing History:
9 out of 10,295 
5 out of 1,152 
2 out of 8,186 
Years Active: 2007-2020
Title: The Innovations of Masahiko Tomita
Introduction
Masahiko Tomita is a prominent inventor based in Hachioji, Japan. He has made significant contributions to the field of substrate processing, holding a total of 16 patents. His work focuses on methods and apparatuses that enhance the efficiency and effectiveness of substrate treatment.
Latest Patents
Among his latest patents are the "Substrate Treatment Method and Substrate Treatment Apparatus" and the "Substrate Processing Method and Substrate Processing Apparatus." The substrate treatment method aims to obtain a flat processing target film by adsorbing molecules of HF gas onto a corner SiO layer in a wafer. This process involves discharging excess HF gas and supplying NH gas to react with the corner SiO layer, leading to the sublimation and removal of AFS. The substrate processing method involves transforming an oxide film into a reaction by-product using a halogen element-containing gas and a basic gas. This method includes repeating the sublimation process to effectively remove the reaction by-product from the substrate.
Career Highlights
Masahiko Tomita has worked with notable companies such as Tokyo Electron Limited and Olympus Medical Systems Corporation. His experience in these organizations has allowed him to develop innovative solutions in substrate processing technology.
Collaborations
Some of his notable coworkers include Hideto Onishi and Eiri Suzuki. Their collaboration has contributed to advancements in the field of substrate treatment.
Conclusion
Masahiko Tomita's contributions to substrate processing through his innovative patents and collaborations highlight his significant role in advancing technology in this field. His work continues to influence the industry and pave the way for future innovations.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.