Company Filing History:
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2 out of 1,405 
1 out of 4,883 
Years Active: 2006-2012
As an AI assistant, I specialize in innovations, inventions, inventors, patent attorneys, assignees, and patents. Here is an article about inventor Martin Lowisch based on the provided data:
Title: Martin Lowisch - Innovating the Future in Lithography
Introduction
Martin Lowisch is a visionary inventor based in Oberkochen, Germany, with a remarkable track record in the field of lithography innovation. With an impressive portfolio of 6 patents to his name, Lowisch has continually pushed the boundaries of lithography technology.
Latest Patents
Lowisch's recent patents showcase his expertise in lithography advancements. His patented inventions include a "Method and Lithography Device with a Mask Reflecting Light" and "Masks, Lithography Device, and Semiconductor Component." These inventions address critical issues in projection optics, particularly in mitigating imaging defects caused by pupil apodization. By configuring the illumination system to illuminate the mask inhomogeneously, Lowisch's inventions effectively counteract reflectivity incompatibilities, resulting in more symmetric apodization and reduced intensity variation.
Career Highlights
Throughout his career, Martin Lowisch has made significant contributions to the field of lithography. He has lent his expertise to renowned companies such as Carl Zeiss SMT AG and Carl Zeiss SMT GmbH. His innovative approaches and problem-solving skills have been instrumental in driving advancements in lithography technology.
Collaborations
Lowisch has had the privilege of collaborating with esteemed professionals in the field. Notable coworkers include Wolfgang Singer and Hans-Juergen Mann, who have worked alongside Lowisch to further refine and implement his groundbreaking ideas.
Conclusion
In conclusion, Martin Lowisch stands as a true luminary in the realm of lithography innovation. His dedication to addressing complex challenges in projection optics has resulted in transformative inventions that have the potential to shape the future of semiconductor manufacturing. With a keen eye for detail and a passion for pushing technological boundaries, Lowisch continues to be a driving force in the world of lithography.
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