The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2009
Filed:
Sep. 27, 2003
Udo Dinger, Oberkochen, DE;
Frank Eisert, Aalen, DE;
Stefan Koehler, Aalen-.Ebnat, DE;
Andreas Ochse, Oberkochen, DE;
Johannes Zellner, Oberkochen, DE;
Martin Lowisch, Oberkochen, DE;
Timo Laufer, Aalen, DE;
Udo Dinger, Oberkochen, DE;
Frank Eisert, Aalen, DE;
Stefan Koehler, Aalen-.Ebnat, DE;
Andreas Ochse, Oberkochen, DE;
Johannes Zellner, Oberkochen, DE;
Martin Lowisch, Oberkochen, DE;
Timo Laufer, Aalen, DE;
Carl Zeiss SMT AG, , DE;
Abstract
A projection objectivefor short wavelengths, in particular for wavelengths λ<157 nm is provided with a number of mirrors [MMMMMand Mthat are arranged positioned precisely in relation to an optical axisThe mirrors [MMMMMand Mhave multilayer coatings. At least two different mirror materials are provided which differ in the rise in the coefficient of thermal expansion as a function of temperature in the region of the zero crossing of the coefficients of thermal expansion, in particular in the sign of the size.