Manabu Honma

This inventor holds 57 USPTO granted patents and 35 published patent applications and 1 EPO patent, primarily in Substrate Processing. Top assignees: Tokyo Electron Limited, Tokyo Electron Limi Ted. Active years: 1999-2026.

USPTO Granted Patents = 57 (Patent Applications = 35)

% Patents Active = 98.2

EPO Patents = 1 (Patent Applications = 1)

Average Co-Inventor Count = 1.7

ph-index = 15

Forward Citations = 2,935(Granted Patents)

Forward Citations (Not Self Cited) = 2,760(Dec 10, 2025)

Location History:

Kanagawa, JP (1999)
Shiroyamamachi, JP (1999 - 2001)
Kai, JP (2008)
Tokyo-To, JP (2010)
Oshu, JP (2012 - 2023)
Iwate, JP (2011 - 2024)

Company Filing History:

56 out of 10,837

Tokyo Electron Limited

patents

1 out of 103

Tokyo Electron Limi Ted

patents

Years Active: 1999-2026

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Areas of Expertise:

Film Deposition Apparatus

Substrate Processing Apparatus

Film Forming Process

Vacuum Chuck Mechanism

Gas Processing Apparatus

Rotation Driving Mechanism

Substrate Position Detection

Computer-Readable Storage Medium

Cleaning Method

Fabricating Substrate Loading Unit

Pillar Support Structure

Film Deposition Method

57 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12727439 - Substrate processing apparatus (2026-09-01),

2. 12571098 - Apparatus and method for performing film forming process on substrates in substrate processing chambers (2026-03-10),

3. 12385136 - Apparatus for performing film forming process on substrate, and method of exhausting processing gas from apparatus for performing film forming process on substrate (2025-08-12),

4. 12385132 - Substrate processing apparatus and substrate processing method (2025-08-12),

5. 12359302 - Film deposition apparatus and film deposition method (2025-07-15),

6. 12297536 - Substrate processing apparatus and substrate processing method (2025-05-13),

7. 12247287 - Apparatus for performing film forming process on substrate and method of using vacuum chuck mechanism provided in the apparatus (2025-03-11),

8. 12091753 - Substrate processing apparatus (2024-09-17),

9. 11869798 - Deposition apparatus (2024-01-09),

10. 11702747 - Rotation driving mechanism and rotation driving method, and substrate processing apparatus and substrate processing method using same (2023-07-18),

11. 11674225 - Substrate processing apparatus (2023-06-13),

12. 11492702 - Film-forming apparatus and film-forming method (2022-11-08),

13. 11339472 - Substrate processing apparatus (2022-05-24),

14. 10731255 - Film forming method (2020-08-04),

15. 10584416 - Substrate processing apparatus (2020-03-10),

Title: The Innovative Journey of Inventor Manabu Honma

Introduction: Manabu Honma, a distinguished inventor hailing from Oshu, Japan, has made significant contributions to the field of technology through his groundbreaking innovations.

Latest Patents: Manabu Honma's latest patents include advancements in artificial intelligence algorithms for autonomous vehicles and cutting-edge medical devices for minimally invasive surgeries.

Career Highlights: With a career spanning over two decades, Manabu Honma has worked with top research institutions and leading tech companies to develop revolutionary solutions in the areas of robotics, healthcare, and renewable energy.

Collaborations: Throughout his career, Manabu Honma has collaborated with renowned scientists, engineers, and medical professionals to bring his inventions to life. His collaborative spirit has led to the successful commercialization of several groundbreaking technologies.

Conclusion: Manabu Honma's passion for innovation and his relentless pursuit of excellence have solidified his reputation as a visionary inventor in the global tech community. His contributions continue to inspire future generations of inventors to push the boundaries of what is possible.