The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2024
Filed:
Dec. 04, 2023
Tokyo Electron Limited, Tokyo, JP;
Manabu Honma, Iwate, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A substrate processing apparatus includes a processing module including a first sidewall and a second sidewall that are spaced apart in a first horizontal direction, and a transferring module that is configured to transfer a substrate to the processing module and that is disposed adjacent to the first sidewall. The processing module includes a first processing container and a second processing container that are adjacent to each other in a second horizontal direction perpendicular to the first horizontal direction. A maintenance opening common for performing maintenance on the first processing container and the second processing container is provided in the second sidewall. The maintenance opening is provided to include an intermediate position between the first processing container and the second processing container in the second horizontal direction.