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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11869798 B1

PDFFull Text
Date of Patent:
Jan. 09, 2024

Filed:

Jan. 21, 2021

Deposition apparatus

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Manabu Honma, Iwate, JP;

Yudo Sugawara, Iwate, JP;

Noriko Sato, Iwate, JP;

Assignee:

Tokyo Electron Limited, Tokyo, JP;

Attorney:

IPUSA, PLLC

Primary Examiner:

Aiden Lee

Int. Cl.
CPC ...
C23C 16/46 (2006.01); H01L 21/687 (2006.01); C23C 14/50 (2006.01); C23C 14/24 (2006.01); H01L 21/67 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68785 (2013.01); C23C 14/24 (2013.01); C23C 14/505 (2013.01); C23C 16/4584 (2013.01); C23C 16/45551 (2013.01); C23C 16/46 (2013.01); H01L 21/67109 (2013.01); H01L 21/67115 (2013.01); H01L 21/68771 (2013.01);
Abstract

A deposition apparatus according to one aspect of the present disclosure includes a vacuum vessel, a rotary table rotatably disposed in the vacuum vessel, a heating device provided below the rotary table, and a radiation adjusting member. The rotary table is configured such that multiple substrates can be placed on the rotary table along a circumferential direction of the rotary table. The heating device is configured to heat the multiple substrates by thermal radiation, and the radiation adjusting member is configured to adjust an amount of radiant heat from the heating device to the plurality of substrates.

Find Patent Forward Citations

Honma, Manabu. (2024). Deposition apparatus (U.S. Patent No. 11869798). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11869798

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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