Nirasaki, Japan

Manabu Amikura

USPTO Granted Patents = 7 

Average Co-Inventor Count = 2.2

ph-index = 4

Forward Citations = 386(Granted Patents)


Company Filing History:


Years Active: 2010-2020

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7 patents (USPTO):Explore Patents

Title: Manabu Amikura: Innovator in Film Forming Technology

Introduction: Manabu Amikura, an esteemed inventor based in Nirasaki, Japan, has made significant contributions to the field of film forming technology. With a total of seven patents to his name, his work reflects a dedication to advancing innovative solutions within the semiconductor industry.

Latest Patents: Among his most recent innovations is a cutting-edge film forming apparatus that enhances the efficiency of the semiconductor manufacturing process. This apparatus features a mounting table that can be lifted or lowered between a processing location and a delivery location. An encompassing member surrounds the mounting table at the processing location, dividing the processing container into distinct upper and lower spaces. The design also includes an exhaust part that effectively evacuates the processing container, a purge gas supply unit for introducing purge gas to the lower space, and a clamp ring that secures the wafer during processing. Another notable patent describes a similar film forming apparatus with key components such as a cylindrical wall extending downward from the clamp ring, which aids in maintaining optimal conditions within the processing environment.

Career Highlights: Manabu Amikura has built a remarkable career, having worked at notable companies such as Tokyo Electron Limited and Covalent Materials Corporation. His inventions have played a vital role in refining manufacturing methods and enhancing product performance in the semiconductor industry.

Collaborations: Throughout his career, Amikura has collaborated with talented professionals including Teruo Iwata and Hiroo Kawasaki. These partnerships have fostered an environment of innovation and have significantly contributed to his accomplishments in the field.

Conclusion: Manabu Amikura exemplifies the spirit of innovation through his persistent efforts and remarkable inventions in film forming technology. His contributions not only improve current manufacturing processes but also pave the way for future advancements in the semiconductor industry. As he continues to develop new technologies, his influence on the field remains significant and inspiring.

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