The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2012
Filed:
Feb. 07, 2007
Kazuo Shibata, Tokyo, JP;
Hiroo Kawasaki, Nirasaki, JP;
Teruo Iwata, Nirasaki, JP;
Manabu Amikura, Nirasaki, JP;
Kazuo Shibata, Tokyo, JP;
Hiroo Kawasaki, Nirasaki, JP;
Teruo Iwata, Nirasaki, JP;
Manabu Amikura, Nirasaki, JP;
Covalent Materials Corporation, Tokyo, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
To provide a plane heater, including a carbon wire heating element CW, in which surface arrangement density of the heating element CW in an outer area is denser than that in an inner area. A power supply terminal unit having connection wires for supplying electricity to the heating element CW is arranged in the center on the back side of a silica glass plate-like member. Connection wiresandconnected with the heating element CW in the inner area are connected with the heating element in the inner area in the center of the silica glass plate-like member. Connection wiresandconnected with the heating element in the outer area are extended from the center of the silica glass plate-like member toward the outer area and connected with the heating element CW in the outer area, without intersecting the heating element CW in the inner area.