The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2010
Filed:
Jan. 14, 2005
Manabu Amikura, Nirasaki, JP;
Manabu Amikura, Nirasaki, JP;
Tokyo Electron Limited, Tokyo-to, JP;
Abstract
A shower head structure () includes a shower head main body () of a one-piece structure formed in a generally cup shape and having a bottom wall (A) provided with a plurality of gas injection holes (A,B) formed therein and a side wall (B) rising from a peripheral portion of the bottom wall. A plurality of gas diffusion chamber forming plates (A-C) are housed in the shower head main body (). A through-hole is formed in a head mounting frame () disposed on a ceiling of a processing vessel (). An upper portion of the side wall (B) of the shower head main body () is inserted into the through-hole, so that a part of the side wall (B) is exposed to the exterior of the processing vessel. A cooling mechanism () is disposed at the upper end portion of the side wall (B). Heat transfer between the cooling mechanism () and the bottom wall (A) is enhanced, so that the temperature of the bottom wall (A) can be controlled at a proper value, thereby preventing any adhesion of an unnecessary film onto the bottom wall (A).