Mamoru Kosakai

Title: Innovations by Mamoru Kosakai: Pioneering Advances in Electrostatic Chuck Technology

Introduction

Mamoru Kosakai is a distinguished inventor based in Tokyo, Japan, with an impressive portfolio of 32 patents to his name. His contributions to the field of electrostatic chuck devices have significantly advanced the technology used in various applications, including semiconductor manufacturing.

Latest Patents

Among his latest innovations, Kosakai has developed an electrostatic chuck device that features a unique design aimed at improving performance. This device consists of an electrostatic chuck part equipped with a sample placing surface and a first electrode intended for electrostatic attraction. It incorporates a cooling base part positioned on the opposite side of the sample placing surface to regulate the temperature of the electrostatic chuck. The patented design includes an adhesive layer that effectively bonds these components together, while maintaining a specific structure that allows for improved functionality. Notably, the electrostatic chuck part has a recess and protrusion on the adhesive layer side, ensuring optimal performance with a precise sheet resistance value of the first electrode.

Another innovative patent focuses on reducing non-uniformity during etching processes on wafer surfaces. This device maintains the essential features of Kosakai's earlier work while adding the functionality of a second RF electrode within the cooling base part. The introduction of a third electrode for RF or LC adjustment, which is insulated from the cooling base part, enhances the overall efficiency and effectiveness of the electrostatic chuck.

Career Highlights

Throughout his career, Mamoru Kosakai has made significant strides in his field, collaborating with notable companies such as Sumitomo Osaka Cement Co., Ltd. and Tokyo Electron Limited. His expertise and inventive spirit have led to groundbreaking advancements in electrostatic equipment, shaping industry standards and practices.

Collaborations

Kosakai has had the opportunity to work alongside esteemed colleagues, including Yukio Miura and Kazunori Ishimura. Their collaborative efforts have fostered an environment of innovation, allowing them to tackle complex challenges within the realm of electrostatic chuck technology.

Conclusion

Mamoru Kosakai's contributions to the field of electrostatic chuck devices underline his position as a leading inventor in the technology space. With a total of 32 patents, his work continues to influence advancements in semiconductor manufacturing processes. As technology evolves, Kosakai's innovations will undoubtedly play a pivotal role in shaping the future of the industry.