The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2016
Filed:
Feb. 06, 2013
Tokyo Electron Limited, Tokyo, JP;
Sumitomo Osaka Cement Co., Ltd., Tokyo, JP;
Yasuharu Sasaki, Kurokawa-Gun, JP;
Kaoru Oohashi, Kurokawa-gun, JP;
Tomoyuki Takahashi, Kurokawa-gun, JP;
Tadashi Aoto, Kurokawa-gun, JP;
Mamoru Kosakai, Tokyo, JP;
Shinichi Maeta, Tokyo, JP;
Yukio Miura, Tokyo, JP;
Takashi Sato, Tokyo, JP;
Kei Furuuchi, Tokyo, JP;
Tokyo Electron Limited, Tokyo, JP;
Sumitomo Osaka Cement Co., Ltd., Tokyo, JP;
Abstract
An electrostatic chuck device includes an electrostatic chuck part that has an upper surface as a placement surface for placing a plate-shaped sample and has an internal electrode for electrostatic attraction built therein; and a cooling base part that cools the electrostatic chuck part. The electrostatic chuck part and the cooling base part are integrally adhered to each other via an adhesive layer. An insulator having a double pipe structure including an insulator and an insulator provided coaxially with an outer peripheral portion of the insulator is provided in a cooling gas hole, formed in the electrostatic chuck part and the cooling base part, so as to cover an exposed surface of the adhesive layer on the cooling gas hole side.