Location History:
- Miyagi-gun, JP (2013)
- Nirasaki, JP (2010 - 2015)
- Kurokawa-gun, JP (2016)
- Miyagi, JP (2005 - 2018)
Company Filing History:
8 out of 10,326 
1 out of 479 Years Active: 2005-2018
Title: The Innovative Contributions of Tadashi Aoto
Introduction
Tadashi Aoto is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of plasma etching technology, holding a total of 8 patents. His work has been instrumental in advancing the efficiency and effectiveness of plasma processing apparatuses.
Latest Patents
Aoto's latest patents include a plasma etching apparatus that features a base made of a metal with a lower expansion coefficient than aluminum. This apparatus includes an electrostatic chuck designed to mount objects for processing, a bonding layer that connects the base to the chuck, and a heater integrated within the chuck. Additionally, he has developed a mounting table and plasma processing apparatus that consists of an electrostatic chuck, a base, and a cylindrical sleeve. This design allows for improved communication between the components, enhancing the overall functionality of the apparatus.
Career Highlights
Throughout his career, Tadashi Aoto has worked with notable companies such as Tokyo Electron Limited and Sumitomo Osaka Cement Co., Ltd. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking innovations in the field of plasma technology.
Collaborations
Aoto has collaborated with esteemed colleagues, including Yasuharu Sasaki and Masakazu Higuma. These partnerships have fostered a creative environment that has led to the development of advanced technologies in plasma processing.
Conclusion
Tadashi Aoto's contributions to the field of plasma etching are noteworthy and have had a lasting impact on the industry. His innovative patents and collaborations with leading companies and professionals highlight his dedication to advancing technology.