The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2009
Filed:
Mar. 01, 2005
Shigeru Senzaki, Miyagi, JP;
Toshiki Sasaki, Miyagi, JP;
Tadashi Aoto, Miyagi, JP;
Nobuyuki Nagayama, Yamanashi, JP;
Kouji Mitsuhashi, Yamanashi, JP;
Shigeru Senzaki, Miyagi, JP;
Toshiki Sasaki, Miyagi, JP;
Tadashi Aoto, Miyagi, JP;
Nobuyuki Nagayama, Yamanashi, JP;
Kouji Mitsuhashi, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A processing device in which maintenance can be easily carried out and a burden on a worker can be reduced, and a method of maintaining the device are provided. An upper electrode unitstructuring a ceiling portion of a processing chamberof an etching deviceis structured from a lower assemblyat a processing chamberside including an upper electrodeand an upper assemblyat a power supply side including an electro-bodyA lock mechanismis released, and after the upper assemblyis independently raised and removed by a lift mechanismmaintenance of the upper assemblyand/or the lower assemblyis carried out. The lock mechanismis locked, and after the upper and lower assembliesare integrally raised and removed by the lift mechanismmaintenance of an interior of the processing chamberis carried out.