Company Filing History:
Years Active: 2005-2019
Title: Shigeru Senzaki: Innovator in Plasma Processing Technology
Introduction
Shigeru Senzaki is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 7 patents. His work has been instrumental in advancing the capabilities of various processing apparatuses used in semiconductor manufacturing.
Latest Patents
One of Senzaki's latest inventions is a plasma processing apparatus. This apparatus includes a processing container, a processing gas supply unit, and a mounting table designed to hold a substrate for processing. It features an upper electrode positioned above the mounting table and a plasma generation unit that supplies high-frequency power to generate plasma from the processing gas. Additionally, the apparatus has an exhaust flow path formed by the side wall of the processing container and the side surface of the mounting table. A conductive rectification plate is included to adjust the flow of the processing gas discharged from the container. The design also incorporates a conductor arranged in the exhaust flow path, which is strategically positioned to optimize the processing of the substrate.
Another notable patent is a temperature control mechanism that comprises multiple combinations of heaters and thyristors. This mechanism allows for precise temperature control by dividing the area of an electrostatic chuck into several zones. A power supply is configured to deliver current to the heaters through the thyristors, ensuring efficient operation. Filters are also included to eliminate high-frequency power applied to the power supply, enhancing the overall performance of the system.
Career Highlights
Shigeru Senzaki is associated with Tokyo Electron Limited, a leading company in the semiconductor equipment industry. His innovative work has contributed to the company's reputation for excellence in technology and manufacturing processes.
Collaborations
Senzaki has collaborated with notable coworkers such as Toshiki Sasaki and Tadashi Aoto. Their combined expertise has fostered advancements in the field of plasma processing and temperature control technologies.
Conclusion
Shigeru Senzaki's contributions to plasma processing technology and temperature control mechanisms have made a significant impact in the semiconductor industry. His innovative patents and collaborations continue to drive advancements in this critical field.