The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2017
Filed:
Mar. 06, 2015
Tokyo Electron Limited, Tokyo, JP;
Sumitomo Osaka Cement Co., Ltd., Tokyo, JP;
Yasuharu Sasaki, Nirasaki, JP;
Kenji Masuzawa, Nirasaki, JP;
Toshiyuki Makabe, Nirasaki, JP;
Mamoru Kosakai, Tokyo, JP;
Takashi Satou, Tokyo, JP;
Kazunori Ishimura, Tokyo, JP;
Ryuuji Hayahara, Tokyo, JP;
Hitoshi Kouno, Tokyo, JP;
Tokyo Electron Limited, Tokyo, JP;
Sumitomo Osaka Cement Co., Ltd., Tokyo, JP;
Abstract
Disclosed is an electrostatic chuck apparatus which is configured of: an electrostatic chuck section; an annular focus ring section provided to surround the electrostatic chuck section; and a cooling base section which cools the electrostatic chuck section and the focus ring section. The focus ring section is provided with an annular focus ring, an annular heat conducting sheet, an annular ceramic ring, a nonmagnetic heater, and an electrode section that supplies power to the heater.