Kenji Masuzawa

Title: Kenji Masuzawa: Innovator in Electrostatic Chuck Technology

Introduction

Kenji Masuzawa is a notable inventor based in Nirasaki, Japan. He has made significant contributions to the field of electrostatic chuck technology, holding a total of four patents. His work has been instrumental in advancing the efficiency and functionality of electrostatic chuck apparatuses.

Latest Patents

Masuzawa's latest patents include an innovative electrostatic chuck apparatus. This apparatus is designed with an electrostatic chuck section, an annular focus ring section that surrounds the chuck, and a cooling base section that effectively cools both the chuck and the focus ring. The focus ring section is equipped with an annular focus ring, an annular heat conducting sheet, an annular ceramic ring, a nonmagnetic heater, and an electrode section that supplies power to the heater. This design enhances the performance and reliability of the electrostatic chuck apparatus.

Career Highlights

Throughout his career, Kenji Masuzawa has worked with prominent companies such as Tokyo Electron Limited and Sumitomo Osaka Cement Co., Ltd. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking innovations in his field.

Collaborations

Masuzawa has collaborated with esteemed colleagues, including Yasuharu Sasaki and Toshiyuki Makabe. These partnerships have fostered a creative environment that has led to the development of advanced technologies.

Conclusion

Kenji Masuzawa's contributions to electrostatic chuck technology exemplify his dedication to innovation and excellence. His patents and collaborations reflect a commitment to advancing the field, making him a significant figure in the world of inventions.