Tokyo, Japan

Kazunori Ishimura


Average Co-Inventor Count = 4.7

ph-index = 3

Forward Citations = 37(Granted Patents)


Location History:

  • Funabashi, JP (2004)
  • Tokyo, JP (2015 - 2022)

Company Filing History:


Years Active: 2004-2022

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10 patents (USPTO):Explore Patents

Title: Kazunori Ishimura: Innovator of Electrostatic Chuck Technology

Introduction

Kazunori Ishimura, a distinguished inventor located in Tokyo, Japan, has made significant contributions to the field of semiconductor manufacturing through his innovative designs. With a remarkable portfolio of 10 patents, Ishimura has been at the forefront of developing advanced technologies that enhance the efficiency and capability of electrostatic chuck devices.

Latest Patents

Among his latest innovations, Ishimura's patents for electrostatic chuck devices stand out. These devices are designed with an electrostatic chuck part featuring a mounting surface for plate-shaped samples, incorporating an electrostatic attraction electrode. One notable patent details a configuration that includes a cooling base part, a layered heater, and a bonding adhesion layer that integrates the electrostatic chuck and base parts. The device is engineered with intricate through-holes and an insulating structure, ensuring optimal functionality and thermal management. Another patent presents a similar electrostatic chuck device, highlighting advanced features such as a fixed tubular insulator and an annular sealing mechanism that further enhance the performance and reliability of the chuck during semiconductor processing.

Career Highlights

Throughout his career, Kazunori Ishimura has collaborated with prestigious companies, including Sumitomo Osaka Cement Co., Ltd. and Tokyo Electron Limited. His experience in these organizations has allowed him to refine his inventions and implement practical applications in the semiconductor industry, pushing the boundaries of what's possible in microfabrication.

Collaborations

As an inventor, Ishimura has worked alongside notable colleagues, including Mamoru Kosakai and Ryuuji Hayahara. Their collaboration has fostered an environment of innovation, leading to multiple breakthroughs in electrostatic chuck technology.

Conclusion

Kazunori Ishimura's contributions to the field of semiconductor manufacturing through his patents and collaborations reveal the impact of dedicated inventors on technological advancements. His work exemplifies the intersection of creativity and engineering, solidifying his legacy in the sphere of electrostatic chuck technology.

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