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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11348819 B1

PDFFull Text
Date of Patent:
May. 31, 2022

Filed:

Dec. 11, 2018

Electrostatic chuck device

Applicant:

Sumitomo Osaka Cement Co., Ltd., Tokyo, JP;

Inventors:

Yuuki Kinpara, Tokyo, JP;

Ryuuji Hayahara, Tokyo, JP;

Kazunori Ishimura, Tokyo, JP;

Hitoshi Kouno, Tokyo, JP;

Assignee:

SUMITOMO OSAKA CEMENT CO., LTD., Tokyo, JP;

Attorney:

Merchant & Gould P.C.

Primary Examiner:

Jared Fureman

Assistant Examiner:

Nicolas Bellido

Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); H02N 13/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); H01L 21/67103 (2013.01); H01L 21/67109 (2013.01); H01L 21/67126 (2013.01); H01L 21/67132 (2013.01); H01L 21/67248 (2013.01); H01L 21/6875 (2013.01); H01L 21/68785 (2013.01); H02N 13/00 (2013.01);
Abstract

An electrostatic chuck device includes: an electrostatic chuck part having, as a main surface, a mounting surface on which a plate-shaped sample is mounted, an electrostatic attraction electrode; a base part configured to cool the electrostatic chuck part; a heater disposed in a layered manner between the electrostatic chuck part and the base part; and an adhesion layer which bonds and integrates the electrostatic chuck part and the base part together, in which the electrostatic chuck part is provided with a first through-hole, the base part is provided with a second through-hole communicating with the first through-hole, the adhesion layer is provided with a third through-hole communicating with the first through-hole and the second through-hole, a tubular insulator is fixed in the second through-hole, and an end of the insulator located on the electrostatic chuck part side is separated from the electrostatic chuck part with a space interposed therebetween.

Find Patent Forward Citations

Kinpara, Yuuki. (2022). Electrostatic chuck device (U.S. Patent No. 11348819). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11348819

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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