Yuuki Kinpara

Title: Yuuki Kinpara: Innovator in Electrostatic Chuck Technology

Introduction

Yuuki Kinpara is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of electrostatic chuck devices, holding a total of five patents. His innovative work has advanced the technology used in various industrial applications.

Latest Patents

Kinpara's latest patents include a method for repairing electrostatic chuck devices. This method involves bonding an electrostatic chuck member made of ceramics to a temperature-controlling base member made of metal using a first adhesive layer. The repair process utilizes a cold-curing adhesive to restore the eroded adhesive layer. Another notable patent is for an electrostatic chuck device that features a mounting table with a focus ring and a cooling element. This device is designed with specific conditions to ensure optimal performance, including precise measurements of the holding surface and leak areas.

Career Highlights

Yuuki Kinpara is currently employed at Sumitomo Osaka Cement Co., Ltd., where he continues to innovate in the field of electrostatic chuck technology. His work has been instrumental in enhancing the efficiency and reliability of these devices in various applications.

Collaborations

Kinpara collaborates with talented colleagues, including Keisuke Maeda and Hitoshi Kouno. Their combined expertise contributes to the advancement of technology within their field.

Conclusion

Yuuki Kinpara's contributions to electrostatic chuck technology demonstrate his commitment to innovation and excellence. His patents reflect a deep understanding of the complexities involved in this specialized area, making him a valuable asset to his company and the industry as a whole.