The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2016
Filed:
Apr. 27, 2012
Yukio Miura, Tokyo, JP;
Kazunori Ishimura, Tokyo, JP;
Mamoru Kosakai, Tokyo, JP;
Sumitomo Osaka Cement Co., Ltd., Tokyo, JP;
Abstract
An electrostatic chuck device includes an electrostatic chuck section (), which has a principal surface that is a mounting surface on which a plate-like sample (W) is placed, and has an internal electrode for electrostatic adsorption () incorporated in the section, and a temperature adjustment base section () which adjusts the temperature of the electrostatic chuck section (); wherein a part or all of a surface of the temperature adjustment base section () is covered by a sheet-like or film-like insulating material () wherein the surface faces the side where the electrostatic chuck section is located; a thin plate-like heater element () is bonded on the insulating material (); and the electrostatic chuck section () and the temperature adjustment base section () are integrated with each other via an organic insulating adhesive layer () formed by curing a liquid adhesive.