This inventor holds 17 USPTO granted patents and 1 published patent application and 1 EPO patent, primarily in Semiconductor Cleaning. Top assignees: Acm Research (Shanghai) Inc., Acm Research, Inc.. Active years: 2013-2024.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2013-2024
Areas of Expertise:
Title: Innovations by Inventor Liangzhi Xie
Introduction
Liangzhi Xie is a prominent inventor based in Shanghai, China. He has made significant contributions to the field of semiconductor technology, holding a total of 17 patents. His work focuses on methods and systems for cleaning semiconductor wafers, which are crucial in the manufacturing of electronic devices.
Latest Patents
One of Liangzhi Xie's latest patents is titled "Methods and apparatus for cleaning semiconductor wafers." This invention describes a method for cleaning semiconductor substrates without damaging their patterned structures using an ultra/mega sonic device. The process involves applying liquid into a space between the substrate and the sonic device, adjusting the power supply to prevent bubble cavitation from damaging the substrate, and monitoring the power and frequency to ensure optimal cleaning conditions. Another notable patent is the "System for cleaning semiconductor wafers," which outlines a system designed to control damage during the cleaning process. This system includes a wafer holder, an inlet for cleaning liquid, a sonic generator, and a controller programmed to optimize cleaning parameters to minimize damage.
Career Highlights
Liangzhi Xie has worked with notable companies in the semiconductor industry, including ACM Research (Shanghai) Inc. and ACM Research, Inc. His experience in these organizations has allowed him to develop and refine his innovative cleaning technologies for semiconductor wafers.
Collaborations
Throughout his career, Liangzhi has collaborated with talented individuals such as Jian Wang and Zhaowei Jia. These collaborations have contributed to the advancement of his inventions and the overall progress in semiconductor cleaning technologies.
Conclusion
Liangzhi Xie's contributions to semiconductor technology through his innovative patents and collaborations highlight his importance in the field. His work continues to influence the manufacturing processes of electronic devices, ensuring higher efficiency and quality.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile