Cupertino, CA, United States of America

Lewis N Shen


Average Co-Inventor Count = 2.1

ph-index = 9

Forward Citations = 588(Granted Patents)


Location History:

  • Cupertino, CA (US) (1989 - 2005)
  • Saratoga, CA (US) (2003 - 2005)

Company Filing History:


Years Active: 1989-2005

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35 patents (USPTO):Explore Patents

Title: Innovations and Contributions of Lewis N Shen in Semiconductor Technology

Introduction: Lewis N Shen is a prominent inventor located in Cupertino, California, known for his significant contributions to the field of semiconductor technology. With a remarkable portfolio of 35 patents, he has made substantial advancements in methods that enhance the efficiency and performance of semiconductor devices.

Latest Patents: Among his recent patents, two innovative methods stand out. The first is a “Method for forming SAC using a dielectric as a BARC and FICD enlarger,” which offers a novel approach for manufacturing semiconductor devices. This method utilizes a dielectric as a bottom anti-reflective coating to facilitate the formation of a photoresist contact opening that enlarges the Final Inspection Critical Dimension (FICD) of conductive contacts through a high selectivity etch, resulting in a tapered contact design.

The second notable patent is the “Method of making a memory cell with polished insulator layer.” This improved technique for creating a flash memory cell involves depositing a high-quality oxide insulator on a substrate with a floating gate of a specified thickness. The innovative polishing process ensures that specific portions of the insulator achieve an equal thickness with the floating gate, resulting in a planar structure that enhances the overall performance of the memory cell.

Career Highlights: Lewis has worked for esteemed companies in the technology sector, including Advanced Micro Devices Corporation. His work has consistently focused on enhancing semiconductor fabrication processes, cementing his reputation as an exceptional inventor in this domain.

Collaborations: Throughout his career, Lewis has collaborated with accomplished professionals, including Wenge Yang and Marina V Plat, further enriching the innovation landscape through teamwork and shared expertise.

Conclusion: Lewis N Shen's extensive work and patents showcase his dedication to advancing semiconductor technologies. His inventive spirit and collaborative efforts continue to impact the industry positively, paving the way for future innovations in manufacturing semiconductor devices.

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