Company Filing History:
Years Active: 2013-2017
Title: Kyoyu Yasuda: Innovator in Pattern-Forming Technologies
Introduction
Kyoyu Yasuda is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of pattern-forming technologies, holding a total of 9 patents. His work focuses on advanced methods and compositions that enhance the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
Yasuda's latest patents include a pattern-forming method and a resist underlayer film-forming composition. This innovative method involves providing a resist underlayer film on a substrate using a specific composition that includes a first polymer with a glass transition temperature ranging from 0 to 180°C. Additionally, a silicon-based oxide film is applied to the surface of the resist underlayer film. The process utilizes a resist pattern to facilitate the dry-etching of both the silicon-based oxide film and the resist underlayer film, ultimately allowing for precise substrate etching. Another notable patent involves a silicon-containing film-forming composition that comprises a polysiloxane and an organic solvent, which is crucial for creating high-quality silicon-based films.
Career Highlights
Kyoyu Yasuda is currently employed at JSR Corporation, where he continues to develop innovative solutions in the field of materials science. His expertise in pattern-forming technologies has positioned him as a key figure in advancing semiconductor manufacturing techniques.
Collaborations
Yasuda has collaborated with notable colleagues, including Yushi Matsumura and Shinya Nakafuji. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Kyoyu Yasuda's contributions to the field of pattern-forming technologies are significant and impactful. His innovative patents and collaborative efforts at JSR Corporation highlight his dedication to advancing semiconductor manufacturing processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.