The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 08, 2015

Filed:

Nov. 27, 2012
Applicant:

Jsr Corporation, Tokyo, JP;

Inventors:

Satoshi Dei, Tokyo, JP;

Hayato Namai, Tokyo, JP;

Kyoyu Yasuda, Tokyo, JP;

Koichi Hasegawa, Tokyo, JP;

Assignee:

JSR Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); B05D 1/32 (2006.01); G03F 7/09 (2006.01); H01L 21/311 (2006.01); H01L 21/033 (2006.01); H01L 21/768 (2006.01); C09D 183/06 (2006.01); G03F 7/039 (2006.01); G03F 7/38 (2006.01); G03F 7/40 (2006.01);
U.S. Cl.
CPC ...
B05D 1/322 (2013.01); C09D 183/06 (2013.01); G03F 7/0392 (2013.01); G03F 7/094 (2013.01); G03F 7/38 (2013.01); G03F 7/405 (2013.01); H01L 21/0337 (2013.01); H01L 21/311 (2013.01); H01L 21/76801 (2013.01); H01L 21/76802 (2013.01); H01L 21/76807 (2013.01);
Abstract

An insulation pattern-forming method includes forming an organic pattern on a substrate. A space defined by the organic pattern is filled with an insulating material. The organic pattern is removed to obtain an inverted pattern formed of the insulating material. The inverted pattern is cured. An insulation pattern-forming method includes forming a first organic pattern on the substrate. A space defined by the first organic pattern is filled with an insulating material. An upper surface of the first organic pattern is exposed. A second organic pattern that comes in contact with the upper surface of the first organic pattern is formed. A space defined by the second organic pattern is filled with the insulating material. The first organic pattern and the second organic pattern are removed to obtain an inverted pattern formed of the insulating material. The inverted pattern is cured.


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