Company Filing History:
Years Active: 2015-2023
Title: Koji Koyama: Innovator in Plasma Processing Technology
Introduction
Koji Koyama is a prominent inventor based in Miyagi, Japan, known for his significant contributions to plasma processing technology. With a total of 12 patents to his name, Koyama has made remarkable advancements in the field, particularly in the design and functionality of plasma processing apparatuses.
Latest Patents
Koyama's latest patents include a plasma processing apparatus that features a microwave output unit, a wave guide tube, a tuner, a demodulation unit, and a calculation unit. This innovative apparatus is designed to output a microwave with power corresponding to the setting power while frequency-modulating the microwave within a specified frequency range. The wave guide tube effectively guides the microwave to an antenna of the chamber main body. Additionally, the tuner adjusts the position of a movable plate within the wave guide tube. The demodulation unit acquires traveling wave power and reflected wave power for each frequency, while the calculation unit determines the absorption frequency by calculating the reflection coefficient based on these powers. Another notable patent is a plasma processing apparatus that includes a processing chamber, a gas supply unit, a power supply unit, and a frequency control unit. This apparatus accommodates a target object and generates plasma of the processing gas by supplying power of a predetermined frequency band into the processing chamber.
Career Highlights
Throughout his career, Koyama has worked with notable companies, including Tokyo Electron Limited. His experience in these organizations has allowed him to refine his skills and contribute to the development of cutting-edge technologies in plasma processing.
Collaborations
Koyama has collaborated with esteemed colleagues such as Naoki Matsumoto and Jun Yoshikawa. Their combined expertise has fostered innovation and advancement in their respective fields.
Conclusion
Koji Koyama's work in plasma processing technology exemplifies the impact of innovation in modern engineering. His patents and collaborations highlight his dedication to advancing the field and improving technological applications.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.