The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 25, 2018
Filed:
Apr. 01, 2015
Applicant:
Tokyo Electron Limited, TOKYO, JP;
Inventors:
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); H01J 37/32 (2006.01); C23C 16/511 (2006.01); H05H 1/46 (2006.01); H01Q 13/10 (2006.01); H01Q 21/06 (2006.01); H01Q 21/20 (2006.01); H01L 21/3213 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3222 (2013.01); C23C 16/511 (2013.01); H01J 37/32238 (2013.01); H01J 37/32715 (2013.01); H01Q 13/10 (2013.01); H01Q 21/064 (2013.01); H01Q 21/20 (2013.01); H05H 1/46 (2013.01); H01J 2237/334 (2013.01); H01L 21/32137 (2013.01); H05H 2001/4667 (2013.01);
Abstract
An antenna includes a dielectric window and a slot plate provided at one surface of the dielectric window. The slot plate includes a plurality of slot pairs each being formed of two slots. The slot pairs are concentrically disposed about a centroid position of the slot plate and provided at positions where straight lines extending from the centroid position of the slot plate and passing through each slot pair are not overlapped with each other.