The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 03, 2020

Filed:

Jun. 21, 2018
Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Yuki Kawada, Miyagi, JP;

Koji Koyama, Miyagi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 10/00 (2006.01); H01J 37/32 (2006.01); C23C 16/511 (2006.01); H01L 21/3213 (2006.01); H01Q 1/36 (2006.01); H01Q 15/08 (2006.01); H01Q 21/00 (2006.01); H01Q 21/06 (2006.01); H05H 1/46 (2006.01); H01Q 13/10 (2006.01); H01Q 1/42 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3222 (2013.01); C23C 16/511 (2013.01); H01J 37/32238 (2013.01); H01L 21/32137 (2013.01); H01Q 1/366 (2013.01); H01Q 13/10 (2013.01); H01Q 15/08 (2013.01); H01Q 21/0056 (2013.01); H01Q 21/064 (2013.01); H05H 1/46 (2013.01); H01Q 1/42 (2013.01);
Abstract

In an antenna including a dielectric window and a slot plate provided on one surface of the dielectric window, in a case where a reference position g is a center position in a width direction of each slot S and a center position in a length direction in the slot plate, the reference position g of each slot is located on a virtual circle centered on a center of gravity G, and line segments connecting the reference positions g of the slots S and virtual point Gto which the slots belong are located radially from a virtual point G, angles (βto β) between adjacent line segments are equal to each other, and angles (θto θ) formed by the length directions of the slots S at the reference positions g and the line segments to which the slots belong are equal to each other.


Find Patent Forward Citations

Loading…