Kiyohiro Matsushita

This inventor holds 14 USPTO granted patents and 3 published patent applications, primarily in Semiconductor Processing. Top assignees: Asm Japan K.k., Asm IP Holding B.v.. Active years: 2004-2016.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Kiyohiro Matsushita. Retrieved from https://idiyas.com/inventor/kiyohiro-matsushita

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Calculating rank

USPTO Granted Patents = 14 (Patent Applications = 3)

% Patents Active = 100.0

Average Co-Inventor Count = 3.1

ph-index = 12

Forward Citations = 5,594(Granted Patents)

Location History:

Tama, JP (2004 - 2010)
Hachioji, JP (2014)
Fuchu, JP (2012 - 2016)

Company Filing History:

Years Active: 2004-2016

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Areas of Expertise:

Hydrophobization

Silicon Film

ALD

Dielectric Layer

SiOCH Film

UV Irradiation

Interconnect Structure

Cyclic Processes

Gas Flow Rate

Chemical Stability

Low Dielectric Constant

Semiconductor Device

14 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 9478414 - Method for hydrophobization of surface of silicon-containing film by ALD (2016-10-25),

2. 9190263 - Method for forming SiOCH film using organoaminosilane annealing (2015-11-17),

3. 9136108 - Method for restoring porous surface of dielectric layer by UV light-assisted ALD (2015-09-15),

4. 9029272 - Method for treating SiOCH film with hydrogen plasma (2015-05-12),

5. 8785215 - Method for repairing damage of dielectric film by cyclic processes (2014-07-22),

6. 8664627 - Method for supplying gas with flow rate gradient over substrate (2014-03-04),

7. 8241991 - Method for forming interconnect structure having airgap (2012-08-14),

8. 7807566 - Method for forming dielectric SiOCH film having chemical stability (2010-10-05),

9. 7789965 - Method of cleaning UV irradiation chamber (2010-09-07),

10. 7763869 - UV light irradiating apparatus with liquid filter (2010-07-27),

11. 7718544 - Method of forming silicon-containing insulation film having low dielectric constant and low diffusion coefficient (2010-05-18),

12. 7501292 - Method for managing UV irradiation for curing semiconductor substrate (2009-03-10),

13. 7354852 - Method of forming interconnection in semiconductor device (2008-04-08),

14. 6818570 - Method of forming silicon-containing insulation film having low dielectric constant and high mechanical strength (2004-11-16),

Title: The Innovative Journey of Inventor Kiyohiro Matsushita

Introduction: Kiyohiro Matsushita, a pioneering inventor hailing from Fuchu, Japan, has made significant contributions to the world of technology and innovation through his groundbreaking inventions.

Latest Patents: Matsushita's latest patents focus on advancements in renewable energy technologies, particularly in the field of solar power generation and energy storage solutions.

Career Highlights: Throughout his illustrious career, Matsushita has been instrumental in developing cutting-edge electronic devices, including innovative consumer electronics and high-tech medical equipment that have revolutionized their respective industries.

Collaborations: Matsushita has collaborated with leading research institutions and universities in Japan to further his research and bring his inventions to life. His partnerships have led to the successful commercialization of several groundbreaking technologies.

Conclusion: In conclusion, Kiyohiro Matsushita's relentless pursuit of innovation and his passion for creating transformative technologies have solidified his reputation as a visionary inventor in the global innovation landscape.

Profile summary based on public USPTO records.

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]

3 patents pending: