The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2010
Filed:
Sep. 19, 2007
Applicants:
Kiyohiro Matsushita, Tama, JP;
Hideaki Fukuda, Tama, JP;
Kenichi Kagami, Tama, JP;
Inventors:
Assignee:
ASM Japan K.K., Toyko, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 7/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of cleaning a UV irradiation chamber includes steps of: (i) after completion of irradiating a substrate with UV light transmitted through an optical transmitted window provided in the UV irradiation chamber, generating radical species of a cleaning gas outside the UV irradiation chamber; and (ii) introducing the radical species from the outside of the UV irradiation chamber into the UV irradiation chamber, thereby cleaning the optical transmitted window.
Published as: