Mountain View, CA, United States of America

Keith A Miller

This inventor holds 80 USPTO granted patents and 36 published patent applications and 2 EPO patents, primarily in Physical Vapor Deposition (CPC class H01J). Top assignee: Applied Materials, Inc.. Active years: 2000-2026.

USPTO Granted Patents = 80 (Patent Applications = 36)

% Patents Active = 95.0

EPO Patents = 2 (Patent Applications = 2)

Average Co-Inventor Count = 3.1

ph-index = 12

Forward Citations = 782(Granted Patents)

Forward Citations (Not Self Cited) = 701(Dec 10, 2025)

Inventors with similar research interests:

Location History:

Santa Clara, CA (US) (2000)
Sunnyvale, CA (US) (2006 - 2024)
Mountain View, CA (US) (2013 - 2024)

Company Filing History:

80 out of 14,403

Applied Materials, Inc.

patents

Years Active: 2000-2026

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Areas of Expertise:

Physical Vapor Deposition

Plasma Control

Substrate Processing

RF Generator

Ion Fraction

Electrostatic Chuck

Gas Flow

Cleaning

Anode-Cathode Ratio

Magnetron Control

Thermal Treatment

Detachable Chuck

80 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12660553 - High temperature and vacuum isolation processing mini-environments (2026-06-16),

2. 12529133 - Sputter system with magnet motion source (2026-01-20),

3. 12469681 - Broadband supply circuitry for a plasma processing system (2025-11-11),

4. 12325909 - EM source for enhanced plasma control (2025-06-10),

5. 12176190 - Arc management algorithm of RF generator and match box for CCP plasma chambers (2024-12-24),

6. 12094699 - Methods and apparatus for controlling ion fraction in physical vapor deposition processes (2024-09-17),

7. D1037954 - Self-retained low friction pad (2024-08-06),

8. 12027354 - Cleaning of SIN with CCP plasma or RPS clean (2024-07-02),

9. 12018361 - Waveform shape factor for pulsed PVD power (2024-06-25),

10. 12014906 - High temperature detachable very high frequency (VHF) electrostatic chuck (ESC) for PVD chamber (2024-06-18),

11. D1026054 - Collimator for a physical vapor deposition (PVD) chamber (2024-05-07),

12. 11915918 - Cleaning of sin with CCP plasma or RPS clean (2024-02-27),

13. 11898236 - Methods and apparatus for processing a substrate (2024-02-13),

14. 11868147 - Optical emission spectroscopy control of gas flow in processing chambers (2024-01-09),

15. D1009816 - Collimator for a physical vapor deposition chamber (2024-01-02),

Certainly! Here is the article about inventor Keith A Miller based on the given data:

Title: Inventor Spotlight: Keith A Miller Revolutionizing Plasma Cleaning in Mountain View, CA

Introduction:

Keith A Miller, a prolific inventor based in Mountain View, California, has made significant contributions to the field of plasma technology with an impressive portfolio of 69 patents.

Latest Patents:

Among his recent patents is an innovative invention for the cleaning of silicon wafers using CCP plasma or RPS clean. This physical vapor deposition processing chamber facilitates precise substrate processing through advanced chamber design and in-chamber cleaning methods. Additionally, Keith's invention includes methods and apparatus for efficient substrate processing, enhancing efficiency and quality in semiconductor manufacturing processes.

Career Highlights:

Keith A Miller is currently affiliated with Applied Materials, Inc., a renowned company in the semiconductor industry. His groundbreaking work at Applied Materials has solidified his reputation as a visionary in plasma technology and semiconductor processing.

Collaborations:

In his professional journey, Keith has collaborated with esteemed colleagues such as Ilya Lavitsky and Martin Lee Riker. Together, they have explored new frontiers in plasma cleaning and substrate processing, driving innovation in the semiconductor industry.

Conclusion:

In conclusion, Keith A Miller's ingenuity and expertise in plasma technology have had a profound impact on semiconductor manufacturing. His dedication to pushing the boundaries of technology continues to inspire advancements in the field, making him a key figure in the realm of innovation.