The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 20, 2026
Filed:
Oct. 18, 2024
Applied Materials, Inc., Santa Clara, CA (US);
Nagabhushana Nanjundappa, Bangalore, IN;
Kirankumar Neelasandra Savandaiah, Bangalore, IN;
Bhaskar Prasad, Jamshedpur, IN;
Bryan Jeffrey Puch, Kalispell, MT (US);
Martin Lee Riker, Milpitas, CA (US);
Keith A. Miller, Mountain View, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A sputter source assembly for a sputter system is disclosed. The sputter source assembly includes a magnetron movable within a reservoir. The sputter source assembly also includes a magnetron actuator having first and second shafts extending along an axis and passing from an interior of the reservoir to an exterior thereof. Further, the magnetron actuator includes first and second motors disposed external to the reservoir and each aligned coaxially with the axis, the first and second motors being arranged to rotatably drive the first and second shafts, respectively, so as to cause movement of the magnetron.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile