Kazuhiro Aiura, hailing from Koshi, Japan, is a noted inventor with a remarkable portfolio of 19 patents. His creativity and expertise have significantly contributed to advancements in substrate processing technology.

Latest Patents

Among his latest innovations are two notable inventions related to substrate processing apparatus and methods. The first patent outlines a substrate processing apparatus that features a substrate rotator, which holds and rotates a substrate, complemented by an outer cup that covers its periphery. This design includes an inner cup beneath the substrate, an annular drain for discharging processing liquid, and an exhaust passage for efficient liquid management through an oblique exhaust hole. The second patent also focuses on a substrate processing apparatus, incorporating a holder, nozzle arm, and position adjusting device to enhance precision in substrate processing.

Career Highlights

Kazuhiro Aiura is a key member of Tokyo Electron Limited, a company recognized for its commitment to innovation in the semiconductor industry. His work at the company demonstrates a dedication to refining substrate processing technologies, making a significant impact in the field.

Collaborations

Throughout his career, Aiura has collaborated with esteemed colleagues such as Norihiro Ito and Norihiro Itoh. These partnerships highlight the importance of teamwork in driving technological advancements and innovations in substrate processing methods.

Conclusion

Kazuhiro Aiura's inventive spirit and contributions to the field of substrate processing underscore the vital role of inventors in technological progress. With a total of 19 patents, his work continues to influence the semiconductor industry and inspire future innovations.

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