The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2017
Filed:
Jul. 11, 2012
Norihiro Ito, Koshi, JP;
Kazuhiro Aiura, Koshi, JP;
Naoki Shindo, Koshi, JP;
Yosuke Hachiya, Koshi, JP;
Takashi Nagai, Koshi, JP;
Norihiro Ito, Koshi, JP;
Kazuhiro Aiura, Koshi, JP;
Naoki Shindo, Koshi, JP;
Yosuke Hachiya, Koshi, JP;
Takashi Nagai, Koshi, JP;
Tokyo Electron Limited, Minato-Ku, JP;
Abstract
A top plate is provided with a top plate rotation mechanism configured to rotate the top plate in a horizontal plane. An outside cup peripheral case disposed around a cup is configured to move between an upper position, in which a top end of the cylinder is positioned above the cup, and a lower position located below the upper position. A nozzle support arm configured to support a nozzle is moved, in a horizontal direction, between an advanced position, in which the arm is advanced into the outside cup peripheral case via a side opening formed in a side surface of the outside cup peripheral case when the cylinder is located in the upper position, and a retracted position, in which the arm is retracted outward from the outside cup peripheral case.