The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 02, 2017
Filed:
Jul. 11, 2012
Applicants:
Kazuhiro Aiura, Koshi, JP;
Norihiro Ito, Koshi, JP;
Takashi Nagai, Koshi, JP;
Inventors:
Assignee:
Tokyo Electron Limited, Minato-ku, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/67 (2006.01); G03F 7/42 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02057 (2013.01); G03F 7/42 (2013.01); H01L 21/6708 (2013.01); H01L 21/67051 (2013.01); H01L 21/67115 (2013.01);
Abstract
A liquid treatment apparatus includes a substrate holding member that holds a substrate horizontally, a rotation mechanism that rotates the substrate holding member; a chemical liquid nozzle that supplies a chemical liquid to the substrate held by the substrate holding member; a top plate that covers the substrate held by the substrate holding member from above the substrate; and at least one LED lamp that heats the substrate during a chemical liquid treatment by irradiating the substrate with light of a predetermined wavelength through the top plate from above the top plate.