The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2017
Filed:
Aug. 01, 2012
Norihiro Ito, Koshi, JP;
Kazuhiro Aiura, Koshi, JP;
Naoki Shindo, Koshi, JP;
Yosuke Hachiya, Koshi, JP;
Norihiro Ito, Koshi, JP;
Kazuhiro Aiura, Koshi, JP;
Naoki Shindo, Koshi, JP;
Yosuke Hachiya, Koshi, JP;
Tokyo Electron Limited, Minato-Ku, JP;
Abstract
A liquid treatment apparatus includes a substrate holder () that holds a substrate horizontally and rotates the substrate, a treatment liquid nozzle () that supplies a treatment liquid to the substrate held by the substrate holder, a cup () that is arranged outside of a peripheral edge of the substrate held by the substrate holder and receives the treatment liquid which has been supplied to the substrate by the treatment liquid nozzle, a top plate () that covers the substrate held by the substrate holder from above, a top plate rotation driving mechanism that rotates the top plate, and a liquid receiving member () that surrounds a peripheral edge of the top plate and has a circular liquid receiving space ().