The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 2021
Filed:
Jul. 28, 2016
Tokyo Electron Limited, Tokyo, JP;
Norihiro Ito, Koshi, JP;
Jiro Higashijima, Koshi, JP;
Nobuhiro Ogata, Koshi, JP;
Takahisa Otsuka, Koshi, JP;
Yuichi Douki, Koshi, JP;
Yusuke Hashimoto, Koshi, JP;
Kazuhiro Aiura, Koshi, JP;
Daisuke Goto, Koshi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A substrate processing apparatus includes a stationary cup bodyprovided to surround a substrate holding unitand configured to receive a processing liquid or mist of the processing liquid discharged onto a substrate, the stationary cup body not being moved relatively with respect to a processing vessel; a mist guard; and a guard elevating mechanismconfigured to elevate the mist guard. Here, the mist guard is provided at an outside of the stationary cup body to surround the stationary cup body and configured to block a liquid scattered outwards beyond a space above the stationary cup body. Further, the mist guard includes a cylindrical portionof a cylindrical shape and a protruding portionprotruded from an upper portion of the cylindrical portion toward an inside of the cylindrical portion.