Location History:
- Kumamoto-Ken, JP (2004)
- Koshi-machi, JP (2005)
- Kumamoto, JP (2011 - 2021)
- Koshi, JP (2012 - 2024)
Company Filing History:
Years Active: 2004-2025
Title: Innovations of Yuichi Douki: A Pioneer in Substrate Processing Technologies
Introduction
Yuichi Douki is a notable inventor based in Koshi, Japan, recognized for his significant contributions to the field of substrate processing. With an impressive portfolio of 20 patents, Douki has established himself as a key figure in technological innovations aimed at enhancing processing techniques.
Latest Patents
Among his latest patents, the substrate processing apparatus and substrate processing method stands out. This invention provides a substrate processing apparatus that includes a liquid amount detecting part which is designed to detect the liquid amount of a liquid film formed on a substrate. Additionally, a coating state detecting part is included to assess the coating state of the substrate with the liquid film. Another significant patent is a processing apparatus that entails a chamber housing a workpiece, alongside a nozzle situated within the chamber. This apparatus also features a measuring unit that measures the supply flow rate of the processing fluid to the nozzle, an opening/closing unit, and a controller that manages the operational flow path according to specific recipe information.
Career Highlights
Douki's career features pivotal roles at leading companies such as Tokyo Electron Limited, where he has honed his expertise in substrate processing technologies. His work has not only contributed to the company’s advancements but has also played a crucial role in the evolution of the semiconductor manufacturing industry.
Collaborations
Throughout his career, Douki has collaborated with several esteemed professionals, including Suguru Enokida and Tokutarou Hayashi. These collaborations have enabled him to develop innovative solutions that meet the rigorous demands of modern technology.
Conclusion
Yuichi Douki’s contributions to innovations in the substrate processing field demonstrate his commitment to advancing technology through his inventions. His extensive patent portfolio and collaborative efforts underscore his influence as a leading inventor in Japan’s competitive tech landscape. As he continues to innovate, Douki remains a pivotal figure in shaping the future of substrate processing methodologies.