The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2024
Filed:
Feb. 09, 2023
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Masataka Gosho, Koshi, JP;
Yuichi Douki, Koshi, JP;
Satoshi Biwa, Koshi, JP;
Satoshi Okamura, Koshi, JP;
Katsuhiro Ookawa, Koshi, JP;
Yuichiro Kunugimoto, Koshi, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B08B 3/08 (2006.01); B08B 7/04 (2006.01); H01L 21/02 (2006.01); H01L 21/66 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67051 (2013.01); B08B 3/08 (2013.01); B08B 7/04 (2013.01); H01L 21/02057 (2013.01); H01L 21/02101 (2013.01); H01L 21/67028 (2013.01); H01L 21/67253 (2013.01); H01L 21/67288 (2013.01); H01L 21/68764 (2013.01); H01L 22/12 (2013.01); H01L 22/20 (2013.01); H01L 21/67248 (2013.01);
Abstract
There is provided a substrate processing apparatus comprising a liquid amount detecting part configured to detect a liquid amount of a liquid film formed on a substrate; and a coating state detecting part configured to detect a coating state of the substrate with the liquid film formed thereon.